A Compliant Capacitive Sensor for Acoustics: Avoiding Electrostatic Forces at High Bias Voltages
A Compliant Capacitive Sensor for Acoustics: Avoiding Electrostatic Forces at High Bias Voltages
复制标题
用于声学的兼容电容式传感器：避免高偏置电压下的静电力
DOI：
10.1109/jsen.2018.2841345
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发表时间：
2018
影响因子：
4.3
通讯作者：
R. Miles
中科院分区：
文献类型：
--
作者：
R. Miles
提出了一种动态电容式传感器结构的研究，其目的是在移动电极上施加最小的力和运动阻力。其目的是能够使用具有任意顺应性水平的移动电极，而不会遭受大偏置电压的不利影响，例如拉入不稳定性。这种配置将有助于结合具有最小运动阻力的高度顺应性和薄型电极材料。这种类型的材料对于感知声音特别有用。测量结果表明，对于本文所研究的高适应性声传感器设计，可以在不影响其运动的情况下施加400伏的大偏置电压。该传感器对声音的电敏度约为0.5V/Pascal，比典型的声学传感器大两个数量级。
A study is presented of a dynamic capacitive sensor configuration that is intended to impose minimal force and resistance to motion on the moving electrode. The aim is to enable the use of moving electrodes having arbitrary levels of compliance without suffering the adverse effects of large bias voltages such as pull-in instability. This configuration would facilitate the incorporation of highly compliant and thin electrode materials that present the least possible resistance to motion. This type of material is particularly useful for sensing sound. Measured results show that for the highly compliant acoustic sensor design examined here, a large bias voltage of 400 volts can be applied without influencing its motion. The electrical sensitivity to sound is found to be approximately 0.5 V/pascal, two orders of magnitude greater than typical acoustic sensors.