Kojima T., Kimura T., Matsukata, M.: "Development of Numerical Model for Reactions in Fluidized Bed Grid Zone-Application to Chemical Vapor Deposition of Polycrystalline Silicon by Monosilane Pyrolisis-" Chem. Eng. Sci.45. 2527-2534 (1990)
Kojima T., Kimura T., Matsukata, M.: "Development of Numerical Model for Reactions in Fluidized Bed Grid Zone-Application to Chemical Vapor Deposition of Polycrystalline Silicon by Monosilane Pyrolisis-" Chem. Eng. Sci.45. 2527-2534 (1990)
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Kojima T.、Kimura T.、Matsukata, M.:“流化床网格区域反应数值模型的开发 - 通过甲硅烷热解进行多晶硅化学气相沉积的应用 -”Chem。
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