Titanium dioxide (TiO2) thin film based gas sensors
Titanium dioxide (TiO2) thin film based gas sensors
复制标题
二氧化钛 (TiO2) 薄膜气体传感器
DOI：
--
复制
发表时间：
2014
期刊：
影响因子：
--
通讯作者：
N. Pappayee
中科院分区：
文献类型：
--
作者：
J. Jayabharathi;N. Pappayee
Gas sensors are often used as part of a safety system, measure the current discharge in terms of concentration of gas each having unique breakdown voltage. Metal oxide based gas sensors are widely used in various applications. Titanium dioxide (TiO2) gas sensors have better sensitivity and stability during high temperature operations when compared to other metal oxides. Studies on Titanium dioxide thin films for applications in solid state gas sensor devices are considered in the present work. The gas sensing properties of the considered metal oxide are strongly dependent on deposition technique, annealing temperature, film thickness, and properties like crystalline structure, grain size or amount of defects and impurities. TiO2 thin films are prepared by various methods like Magnetron Sputtering technique, Electric field assisted Aerosol CVD, Ultrasonic Spray Pyrolysis etc. An analysis of extensive studies on influence of various properties on gas sensing ability of TiO2 films have been carried out along with the study of different methods used by the researches for preparation of the sensor. TiO2 films formed of agglomerated flower-like nanostructures have also been developed which marks the novelty in the development of efficient metal oxide based gas sensor devices. TiO2 structures have been characterized using various techniques like X-ray diffraction (XRD), Scanning electron microscopy (SEM), Atomic force microscopy, etc.
