Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure
Dual-Frequency Piezoelectric Micromachined Ultrasonic Transducers via Beam-Membrane Coupled Structure
复制标题
梁膜耦合结构双频压电微机械超声波换能器
DOI：
10.1109/led.2021.3075853
复制
发表时间：
2021-06-01
影响因子：
4.9
通讯作者：
Xie, Jin
中科院分区：
文献类型：
--
作者：
Chen, Xuying;Qu, Mengjiao;Xie, Jin
双频压电微机械超声换能器(PMUT)在超声成像方面具有很大的吸引力，可以同时满足大探测深度和高分辨率的要求。在这封信中，我们提出了一种通过梁-膜耦合结构的双频pMUT。束膜耦合pMUT(BM-pMUT)具有两个固有的基频，分别对应于同相和异相模式。采用双电极设计来补偿异相模式的灵敏度，使得BM-pMUT在两种工作模式下都保持了较高的灵敏度。实验结果表明，BM-pMUT在103kHz处的最佳发射灵敏度为18 nm/V，在220kHz处的最佳发射灵敏度为26 nm/V，在103kHz处的最佳接收灵敏度为572.1 mV/Mpa，在220kHz处的最佳接收灵敏度为581.8 mV/Mpa。
Dual-frequency piezoelectric micromachined ultrasonic transducers (pMUTs) are attractive for ultrasonic imaging, which can meet the requirements of large detection depth and high resolution simultaneously. In this letter, we propose a dual-frequency pMUT via beam-membrane coupled structure. The beam-membrane coupled pMUTs (BM-pMUTs) inherently have two fundamental resonant frequencies, corresponding to in-phase and out-of-phase modes. The dual-electrode design is utilized to compensate the sensitivity of out-of-phase mode, hence the BM-pMUTs maintain high sensitivity for both two operation modes. Experimental results show that the optimal transmitting sensitivities of BM-pMUTs are 18 nm/V at 103 kHz and 26 nm/V at 220 kHz when characterized in oil, as well as the optimal receiving sensitivities are 572.1 mV/MPa at 103 kHz and 581.8 mV/MPa at 220 kHz.