Electro-Mechanical Q Factor Control of Photonic Crystal Nanobeam Cavity
Electro-Mechanical Q Factor Control of Photonic Crystal Nanobeam Cavity
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DOI：
10.7567/jjap.52.04cg01
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发表时间：
2013-02
影响因子：
1.5
通讯作者：
R. Ohta;Y. Ota;H. Takagi;N. Kumagai;K. Tanabe;S. Ishida;S. Iwamoto;Y. Arakawa
中科院分区：
文献类型：
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作者：
R. Ohta;Y. Ota;H. Takagi;N. Kumagai;K. Tanabe;S. Ishida;S. Iwamoto;Y. Arakawa
我们设计并演示了一个由微机电系统（MEMS）控制Q值的光子晶体纳米梁腔。该腔与相邻的纳米梁波导倏逝耦合，其Q因子通过机电调节它们之间的差距距离来控制。我们通过实验证明，通过施加0至11 V的电压，可以将Q因子控制在2，250至2，750之间。
We design and demonstrate a photonic crystal nanobeam cavity with a Q factor controllable by a micro-electro-mechanical system (MEMS). The cavity is evanescently coupled to an adjacent nanobeam waveguide, and its Q factor is controlled by electro-mechanically adjusting the gap distance between them. We experimentally demonstrate control of the Q factor from 2,250 to 2,750, by applying voltage from 0 to 11 V.