Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting
Sandwich-structured two-dimensional MEMS electret power generator for low-level ambient vibrational energy harvesting
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DOI：
10.1016/j.sna.2015.02.021
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发表时间：
2015-06-01
影响因子：
4.6
通讯作者：
Hu, Xiao
中科院分区：
文献类型：
--
作者：
Tao, Kai;Miao, Jianmin;Hu, Xiao
本文提出了一种新型三明治结构驻极体发电机（SEPG），用于二维（2D）低水平环境动能收集。该发生器基于对称谐振器，该谐振器由由四折平行梁弯曲件悬挂的双面电极图案地震质量组成。实验分析表明，它能够通过组合频率为121 Hz和125 Hz的两种主要振动模式来从任意面内方向清除动能。在所提出的装置中采用三明治结构，其具有两个彼此异相的独立电容电路180以集成到单个地震质量系统中。这种构造的优点在于可以减小垂直吸引静电力以及水平阻尼力。利用本原型，两个电容部件在125 Hz、0.2 g的加速度下获得0.12 μW的总输出功率，对应于5.56 μW cm(-3) g(-2)的归一化功率密度。结果表明，该发生器有可能提供一种有趣的替代方案，用于从二维振动源中清除低水平的环境能量。 (C) 2015 年由 Elsevier B.V. 出版
This paper presents a novel sandwich-structured electret-based power generator (SEPG) for two-dimensional (2D) low-level ambient kinetic energy harvesting. The generator is based on a symmetrical resonator that consists of a double-sided electrode-patterned seismic mass suspended by four-folded parallel beam flexures. The experimental analysis shows that it is able to scavenge kinetic energy from arbitrary in-plane directions by combining its two primary vibration modes at the frequencies of 121 Hz and 125 Hz. Sandwich structure is adopted in the proposed device that has two separate capacitive circuits 180 out-of-phase with each other to be integrated into a single seismic mass system. This configuration has its merits in that both the vertical pull-in electrostatic force as well as the horizontal damping force can be reduced. With the present prototype, an overall output power of 0.12 mu W is obtained for the two capacitive parts at an acceleration of 0.2 g at 125 Hz, corresponding to a normalized power density of 5.56 mu W cm(-3) g(-2). The results show that the generator can potentially offer an intriguing alternative for scavenging low-level ambient energy from 2D vibration sources. (C) 2015 Published by Elsevier B.V.