Development of swinging part profilometer for optics
Development of swinging part profilometer for optics
复制标题
光学摆动零件轮廓仪的开发
DOI：
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发表时间：
2016
期刊：
影响因子：
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通讯作者：
D. Walker
中科院分区：
文献类型：
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作者：
Peng Zhang;Jie;Guoyu Yu;D. Walker
本文介绍了一种新型的表面测量仪器--摆动件轮廓仪（SPP），它可用于机器人加工光学元件的地面（非镜面）状态的现场测量。本文介绍了SPP的硬件设计，以及用于硬件控制、数据采集和表面重建的软件。第一个样品部分的结果，与干涉计量，并考虑误差的贡献。值得注意的是，在测量周期的每个单独扫描期间，探头保持固定。这有助于由执行表面处理的同一机器人进行自动化探针部署，因为仅在单次扫描的时间尺度上需要探针稳定性。
A new surface metrology instrument, the ‘Swinging Part Profilometer’ (SPP), has been developed for in-situ measurement of optics undergoing robot-processing in the ground (non-specular) state. In this paper, we present the hardware-design of the SPP, together with software for hardware-control, data-acquisition and surface-reconstruction. First results on a sample part are presented, compared with interferometric metrology, and error-contributions considered. Notably, during each individual scan of a measurement-cycle, the probe remains fixed. This lends itself to automated probe-deployment by the same robot as performs surface-processing, as probe stability is required on only the time-scale for a single scan.