The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor
The size dependence of the nano-dots formed by electron-beam-induced deposition on the partial pressure of the precursor
复制标题
电子束诱导沉积形成的纳米点的尺寸对前驱体分压的依赖性
DOI：
10.1007/s00339-003-2394-z
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
K. Furuya
中科院分区：
文献类型：
--
作者：
Miyoko Tanaka;M. Shimojo;K. Mitsuishi;K. Furuya
在超高真空透射电子显微镜下，利用电子束诱导沉积技术，以金属有机气体为气源，成功制备了含W纳米点。点的尺寸可以通过改变照射时间和前体的分压来控制。最小粒径小于2 nm，这是有史以来通过该方法制备的最小粒径。
We have successfully fabricated nano-dots containing W from a metal–organic gas source by electron-beam-induced deposition in an ultra-high vacuum transmission electron microscope. The size of the dots can be controlled by changing the time for irradiation and the partial pressure of the precursor. The smallest particle size is less than 2 nm in diameter, which is the record smallest ever made by this method.