Method for numerical inversion of the ellipsometry equation for transparent films
Method for numerical inversion of the ellipsometry equation for transparent films
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透明薄膜椭偏方程的数值反演方法
DOI：
10.1364/josa.73.000888
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发表时间：
1983
期刊：
影响因子：
--
通讯作者：
Y. Yoriume
中科院分区：
文献类型：
--
作者：
Y. Yoriume
本文介绍了一种由测量的椭偏角θ和Δ确定表面透明膜的折射率和厚度的方法。该方法基于在高斯平面中将一个圆映射到另一个圆的复杂双线性变换。将该方法与Reinberg方法和Newton-Raphson近似进行了比较。在不使厚膜评价劣化的情况下，实现薄膜评价的高收敛性。
A method for determining the refractive index and the thickness of surface transparent films from measured ellipsometric angles Ψ and Δ is described. This method is based on a complex bilinear transformation that maps one circle to another in the Gaussian plane. This method is compared with Reinberg’s method and with the Newton–Raphson approximation. High convergence is realized for thin-film evaluation without deteriorating thick-film evaluation.