Hydrodynamic loading of microcantilevers vibrating in viscous fluids
Hydrodynamic loading of microcantilevers vibrating in viscous fluids
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DOI：
10.1063/1.2202232
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发表时间：
2006-06-01
影响因子：
3.2
通讯作者：
Garimella, Suresh V.
中科院分区：
文献类型：
--
作者：
Basak, Sudipta;Raman, Arvind;Garimella, Suresh V.
本文采用三维有限元流固耦合模型，对弹性微悬臂梁在粘性流体中振动时所受的水动力载荷进行了计算分析。由微悬臂梁在流体中的瞬态振动，精确计算了几种模态的品质因子和附加质量系数。微悬臂梁的几何形状，在更高的弯曲模式，方向和接近表面的操作的影响进行了详细分析。结果表明，在无限大介质中，微悬臂梁阻尼是由微悬臂梁边缘附近的局部流体剪切引起的。然而，在靠近表面处，由于挤压膜效应和边缘附近的粘性剪切的组合而产生阻尼。这些机制上的微悬臂梁的几何形状和取向的表面附近的依赖关系进行了讨论。结果提供了一个全面的理解的流体动力学加载的microcantilevers在粘性流体中，预计将立即感兴趣的原子力显微镜和微悬臂梁生物传感器。(c)2006年，美国物理学会。
The hydrodynamic loading of elastic microcantilevers vibrating in viscous fluids is analyzed computationally using a three-dimensional, finite element fluid-structure interaction model. The quality factors and added mass coefficients of several modes are computed accurately from the transient oscillations of the microcantilever in the fluid. The effects of microcantilever geometry, operation in higher bending modes, and orientation and proximity to a surface are analyzed in detail. The results indicate that in an infinite medium, microcantilever damping arises from localized fluid shear near the edges of the microcantilever. Closer to the surface, however, the damping arises due to a combination of squeeze film effects and viscous shear near the edges. The dependence of these mechanisms on microcantilever geometry and orientation in the proximity of a surface are discussed. The results provide a comprehensive understanding of the hydrodynamic loading of microcantilevers in viscous fluids and are expected to be of immediate interest in atomic force microscopy and microcantilever biosensors. (c) 2006 American Institute of Physics.