Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy
Cmos-Compatible Dual-Resonator MEMS Temperature Sensor with Milli-Degree Accuracy
复制标题
具有毫度精度的 CMOS 兼容双谐振器 MEMS 温度传感器
DOI：
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发表时间：
2007
期刊：
影响因子：
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通讯作者：
T. Kenny
中科院分区：
文献类型：
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作者：
C. Jha;G. Bahl;R. Melamud;S. Chandorkar;M. Hopcroft;B. Kim;M. Agarwal;J. Salvia;H. Mehta;T. Kenny
本文提出了一种双谐振器的设计，它不仅使谐振器的温度传感，但也作为一个通用的温度传感器。温度补偿谐振器的频率稳定性取决于测量谐振器温度的精度。这里描述的双谐振器设计产生谐振器固有的依赖于温度的拍频，从而消除了与使用外部温度传感器相关联的任何空间和时间热滞后。此外，该设计还可以用作CMOS兼容的数字温度传感器。在这项工作中，我们实现了约0.008degC的传感器分辨率，这与当今最好的CMOS温度传感器相当。
This paper presents a dual-resonator design which, not only enables temperature sensing of the resonators but also acts as a general-purpose temperature sensor. The frequency stability of the temperature compensated resonator depends on the accuracy with which the temperature of the resonator is measured. The dual-resonator design, described here, produces temperature-dependent beat frequency which is inherent to the resonator and thus eliminates any spatial and temporal thermal lag associated with the use of an external temperature sensor. Furthermore, this design can also be used as a CMOS-compatible digital temperature sensor. In this work, we achieved the sensor resolution of approximately 0.008degC which is comparable to that of the best CMOS temperature sensors available today.