Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.
Accurate Simulation of Parametrically Excited Micromirrors via Direct Computation of the Electrostatic Stiffness.
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DOI：
10.3390/s17040779
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发表时间：
2017-04-06
期刊：
影响因子：
--
通讯作者：
Boni N
中科院分区：
文献类型：
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作者：
Frangi A;Guerrieri A;Boni N
静电驱动扭转微镜是微光机电系统中的关键元件。当通过面内梳指施加力时，已知主扭转响应的动力学是强非线性的并且由参数共振控制。在这里，为了也追踪镜子响应的不稳定分支，我们实施了一种具有弧长控制的简化连续方法，并提出了一种基于有限元和材料导数概念的创新技术来计算静电刚度；即，按照连续方法的要求，扭矩相对于扭转角的导数。
Electrostatically actuated torsional micromirrors are key elements in Micro-Opto-Electro- Mechanical-Systems. When forced by means of in-plane comb-fingers, the dynamics of the main torsional response is known to be strongly non-linear and governed by parametric resonance. Here, in order to also trace unstable branches of the mirror response, we implement a simplified continuation method with arc-length control and propose an innovative technique based on Finite Elements and the concepts of material derivative in order to compute the electrostatic stiffness; i.e., the derivative of the torque with respect to the torsional angle, as required by the continuation approach.