Improving machining performance of single-crystal diamond tools irradiated by a focused ion beam
Improving machining performance of single-crystal diamond tools irradiated by a focused ion beam
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DOI：
10.1016/j.precisioneng.2013.09.001
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发表时间：
2014-01-01
影响因子：
3.6
通讯作者：
Sasaoka, Hideki
中科院分区：
文献类型：
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作者：
Kawasegi, Noritaka;Niwata, Tomoyuki;Sasaoka, Hideki
在超精密加工中，刀具形状是决定加工区域形状和精度的重要因素。利用聚焦离子束（FIB）是一种有效的手段来制造微米到亚微米尺度的工具形状。然而，离子辐照会导致工具中的掺杂和缺陷，从而降低工具性能。为了在单晶金刚石工具上使用FIB加工而不降低工具性能，使用500摄氏度热处理和铝沉积的组合来去除由离子照射引起的镓（Ga）离子。该方法进行了评价，通过加工实验表明，照射Ga离子导致工作材料粘附到工具表面。这种粘附和由此产生的快速工具磨损通过热处理减少。所提出的方法还提高了转录能力和耐磨性的工具，所以它是能够产生的表面质量优于或等于由非辐照工具，即使在长的切削距离。(C)2013 Elsevier Inc. All rights reserved.
Tool shape is an important factor determining the shape and accuracy of machined areas in ultra-precision machining. Use of a focused ion beam (FIB) is an effective means to fabricate micro- to submicro-scale tool shapes. However, ion irradiation causes doping and defects in the tool that reduce tool performance. To use FIB machining on a single-crystal diamond tool without degrading tool performance, a combination of 500 degrees C heat treatment and aluminum deposition was used to remove gallium (Ga) ions induced by ion irradiation. The method was evaluated through machining experiments that showed that irradiation of Ga ions causes work materials to adhere to the tool surface. This adhesion and the resulting rapid tool wear were reduced by heat treatment. The proposed method also improved the transcription ability and wear resistance of the tool so it was capable of producing a surface quality better than or equal to that produced by non-irradiated tools, even over long cutting distances. (C) 2013 Elsevier Inc. All rights reserved.