Environmental characteristics of surface acoustic wave devices for sensing organophosphorus vapor
Environmental characteristics of surface acoustic wave devices for sensing organophosphorus vapor
复制标题
声表面波有机磷蒸气传感装置的环境特性
DOI：
10.1016/j.snb.2020.127986
复制
发表时间：
2020-07-15
影响因子：
8.4
通讯作者：
Wang, Wen
中科院分区：
文献类型：
--
作者：
Pan, Yong;Zhang, Genwei;Wang, Wen
显然，温度、湿度和干扰气体等复杂的应用环境会对气体传感器的传感过程产生很大的影响。针对气敏过程中的环境特性，对沿延迟线型器件声表面波(SAW)传播路径沉积的氟醇聚硅氧烷(SXFA)制作的声表面波(SAW)传感器件在特定环境下进行了表征。该传感装置对有机磷二甲基膦(DMMP)具有较高的灵敏度、良好的线性和较低的检测下限(LOD)为0.12 mg/m3。通过改变测试温度(5摄氏度-45摄氏度)和湿度(30-80%相对湿度)，考察了相应的对传感器响应的影响。在气敏过程中观察到明显的温湿度交叉敏感现象，并对其原因进行了详细的论证。此外，背景环境中干扰气体和烟雾的交叉干扰测试表明，所设计的传感装置具有良好的抗干扰性。此外，还进行了18个月的长期稳定性试验，以检验传感芯片在温度25℃、相对湿度35%的条件下的疲劳寿命。得出的检测误差小于8%。此外，还对相关机理进行了探讨。
Obviously, the complicated application environment such as the varied temperature, humidity and interfering gases would produce great influences towards sensing process of gas sensors. To address the environmental characteristics in gas sensing process, surface acoustic wave (SAW) sensing devices built by a fluoroalcoholpolysiloxane (SXFA) deposited along the SAW propagation path of delay-line-patterned device were characterized in specific environments. Larger sensitivity, excellent linearity, and lower limit of detection (LOD) of 0.12 mg/m3 were achieved from the proposed sensing device towards organophosphorus dimethyl methyl phosphonate (DMMP). By varying the testing temperature (5 degrees C-45 degrees C) and humidity (30-80 %RH), the corresponding effect on sensor response was examined. Apparent crossed temperature and humidity sensitivity were observed in gas sensing process, and corresponding causes were demonstrated in details. Also, the cross interference test from the interference gases and smoke in the background environment demonstrated excellent anti-interference ability owned in the proposed sensing devices. Additionally, the long-term stability test in 18 months was conducted to examine the fatigue life of the sensing chip at temperature of 25 degrees C and humidity of 35 %RH. The concluded detection error was less than 8%. Moreover, the related mechanisms were also discussed.