A planar micropump utilizing thermopneumatic actuation and in-plane flap valves
A planar micropump utilizing thermopneumatic actuation and in-plane flap valves
复制标题
利用热气动驱动和平面瓣阀的平面微型泵
DOI：
10.1109/mems.2004.1290622
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发表时间：
2004
期刊：
影响因子：
--
通讯作者：
A. Pisano
中科院分区：
文献类型：
--
作者：
S. Zimmermann;J. A. Frank;D. Liepmann;A. Pisano
本文介绍的微型泵展示了与大多数现有机械微型泵相比在性能和制造方面取得的进步。该泵是平面的，采用晶圆级四掩模工艺制造，使其非常适合集成到微型全面分析系统中。其设计采用热气动驱动和两个流体阻力比大于 1300 的平面翻板阀，可在平均功耗 180 mW（20% 占空比，10 Hz）的情况下达到 16 kPa 的最大压力和 9 /spl mu/L/min 的最大流量。平均功耗为 200 mW（20% 占空比，5 Hz）时可实现高达 20.2 kPa 的压力。该性能优于大多数使用平面内或平面外阀门的微型泵。
The micropump presented in this paper demonstrates advancements made both in performance and fabrication over most existing mechanical micropumps. The pump is planar and fabricated using a wafer-level, four-mask process, making it attractive for integration into micro total-analysis systems. Its design utilizes thermopneumatic actuation and two in-plane flap valves with fluidic-resistance ratios greater than 1300 to reach maximum pressures of 16 kPa and maximum flow rates of 9 /spl mu/L/min at an average power consumption of 180 mW (20% duty cycle, 10 Hz). Pressures as high as 20.2 kPa were achieved at an average power consumption of 200 mW (20% duty cycle, 5 Hz). This performance is better than most micropumps utilizing in-plane or out-of-plane valves.