Quantitative Electron Energy-Loss Spectroscopy
Quantitative Electron Energy-Loss Spectroscopy
复制标题
定量电子能量损失谱
DOI：
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发表时间：
1995
期刊：
影响因子：
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通讯作者：
R. Leapman
中科院分区：
文献类型：
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作者：
R. Egerton;R. Leapman
透射电子显微镜中的电子能量损失谱为能量过滤TEM成像提供了解释基础。通常情况下，我们记录的能量依赖性的强度从一个已知的区域的样品，由入射光束或由图像平面（区域选择）光圈定义。最近，记录和处理图像中每个点的完整能量损失谱也变得可行，尽管生成的信息（所谓的谱图像）需要大量的数据存储[5.1，2]。记录整个光谱（或其大部分）对于某些类型的光谱处理是必要的，例如傅里叶对数反卷积，它可以消除复数散射的影响。在这一章中，我们集中在定量方面的EELS和仪器在光谱学中使用。
Electron energy-loss spectroscopy in the transmission electron microscope provides the interpretative foundation for energy-filtered TEM imaging. Typically, we record the energy-dependence of intensity from a known area of a specimen, defined by the incident beam or by an image-plane (area-selecting) aperture. Recently it has also become feasible to record and process a complete energy-loss spectrum for each point in an image, although the information generated (a so-called spectrum-image) requires massive amounts of data storage [5.1,2]. Recording the entire spectrum (or large parts of it) is necessary for some types of spectrum processing, such as Fourier-log deconvolution, which removes the effects of plural scattering. In this chapter, we concentrate on quantitative aspects of EELS and on the instrumentation used in spectroscopy.