Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air
Performance characterization of a new temperature-robust gain-bandwidth improved MEMS gyroscope operated in air
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DOI：
10.1016/j.sna.2008.11.003
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发表时间：
2009-10-01
影响因子：
4.6
通讯作者：
Shkel, Andrei M.
中科院分区：
文献类型：
--
作者：
Trusov, Alexander A.;Schofield, Adam R.;Shkel, Andrei M.
本文报道了一种新型 MEMS 振动速率陀螺仪，该陀螺仪的设计提高了对制造缺陷和环境条件变化的鲁棒性。所提出的架构采用单自由度 (DOF) 驱动模式和全耦合 2-DOF 传感模式。驱动模式工作频率和感测模式带宽可以独立设置，从而放宽了先前报道的具有 2-DOF 感测模式动态减振器 (DVA) 架构的鲁棒陀螺仪固有的增益、芯片尺寸和检测电容之间的权衡。工作频率为 2.5 kHz 的原型在空气中进行了广泛的表征，并展示了 250 Hz 的感应模式 3 dB 带宽。偏置和比例因子的未补偿温度系数分别为 313（度/小时）/摄氏度和 351 ppm 摄氏度。使用片外检测电子器件，速率灵敏度为 28 μV/（度/秒），ARW - 0.09（度/秒）/根 Hz，偏置不稳定性 - 0.08（度/秒），ARRW - 0.03（度/秒）根 Hz。详细的时域、Allan 方差和概率密度函数分析表明，ARW 和 ARRW 均为高斯型且科里奥利不相关，显示出所报告的陀螺仪稳定的运行噪声性能。 (C) 2008 Elsevier B.V. 保留所有权利。
This paper reports a new MEMS vibratory rate gyroscope designed with increased robustness to fabrication imperfections and variations in environmental conditions. The proposed architecture utilizes a single degree-of-freedom (DOF) drive-mode and a fully coupled 2-DOF sense-mode. The drive-mode operational frequency and the sense-mode bandwidth can be set independently, relaxing the tradeoff between the gain, die size, and detection capacitance inherent to the previously reported robust gyroscopes with dynamic vibration absorber (DVA) architecture of the 2-DOF sense-mode. Prototypes with 2.5 kHz operational frequency were extensively characterized in air and demonstrated sense-mode 3 dB bandwidth of 250 Hz. The uncompensated temperature coefficients of bias and scale factor were 313 (degrees/h)/degrees C and 351 ppm degrees C, respectively. Using off-chip detection electronics, the rate sensitivity was 28 mu V/(degrees/s), ARW - 0.09 (degrees/s)/root Hz, bias instability - 0.08 (degrees/s), and ARRW - 0.03 (degrees/s) root Hz. Detailed time domain, Allan variance, and probability density function analysis revealed that both ARW and ARRW are of Gaussian type and Coriolis-uncorrelated, showing stable in-operational noise performance of the reported gyroscope. (C) 2008 Elsevier B.V. All rights reserved.