Nitridation-induced degradation of SiC (1-100) MOS devices
Nitridation-induced degradation of SiC (1-100) MOS devices
复制标题
SiC (1-100) MOS 器件的氮化引起的退化
DOI:
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发表时间:
2022
期刊:
影响因子:
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通讯作者:
and Heiji Watanabe
中科院分区:
文献类型:
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作者:
Takuma Kobayashi;Takato Nakanuma;Asato Suzuki;Mitsuru Sometani;Mitsuo Okamoto;Akitaka Yoshigoe;Takayoshi Shimura;and Heiji Watanabe