Observations of particle layers levitated in a radio‐frequency sputtering plasma
Observations of particle layers levitated in a radio‐frequency sputtering plasma
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射频溅射等离子体中悬浮粒子层的观察
DOI：
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发表时间：
1994
期刊：
影响因子：
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通讯作者：
J. Goree
中科院分区：
文献类型：
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作者：
G. Praburam;J. Goree
在带有石墨电极的射频(RF)溅射等离子体中生长亚微米碳颗粒。激光原位光散射显示，悬浮在等离子体中的粒子呈分层状，厚度往往小于0.5 mm。在某些条件下，层数很大。这些层被组合成云。在纯Ar等离子体中，在下电极上方的鞘边缘附近有一团云，而添加SF6会在上电极附近和辉光区产生额外的粒子云。不同的层似乎根据大小分离粒子，最低层的粒子最重。在几个小时的等离子体操作过程中，这些层坍塌了，并再次生长成更分层的层。考察了气压、射频功率、电极间距、混合气体等参数对测量结果的影响。扫描电子显微镜显示，颗粒为大小不等的球形颗粒，表面呈花椰菜状。其中一些颗粒被发现是...
Submicron carbon particles are grown in an argon radio‐frequency (rf) sputtering plasma with graphite electrodes. In situ laser light scattering revealed particles levitated in the plasma in stratified layers, which were often thinner than 0.5 mm. Under some conditions, the number of layers was very large. These layers are grouped into clouds. In a pure argon plasma, there is one cloud near the sheath edge above the lower electrode, while adding SF6 results in additional particle clouds near the upper electrode and in the glow region. The different layers appear to separate particles according to size, with the heaviest in the lowest layer. During several hours of plasma operation, the layers collapsed and grew again into more stratified layers. The influence of parameters, such as gas pressure, rf power, electrode separation, and gas mixture was investigated. Scanning electron microscopy revealed that the particles were multisized spheres with a cauliflowerlike surface. Some of the particles were found t...