电场作用下热处理对(100)取向的铁电PZT(52/48)薄膜应变和铁电性能影响研究
电场作用下热处理对(100)取向的铁电PZT(52/48)薄膜应变和铁电性能影响研究
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DOI：
10.1016/j.jpcs.2016.08.020
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发表时间：
2016
期刊：
影响因子：
--
通讯作者：
靳辰飞
中科院分区：
文献类型：
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作者：
张思琦;王盛凯;郑馥;靳辰飞
Ferroelectric Pb(Zr0.52Ti0.48)O3 thin films were deposited on the Pt/Ti/SiO2/Si substrate by a sol-gel method. As a direct electric field was applied on the films during thermal treatment, strain behavior and ferroelectric properties have been investigated. X-ray diffraction patterns show that great tensile strain exists nearby the interface of the 250 nm thin film while thermal treatment assisted with direct electric field can obviously relax it. The analysis of hysteresis loops indicates that the remnant polarization increases with the thermal treatment time. These results suggest that electric-field-assisted thermal treatment is an effective way to reduce films' tensile strain through the local plastic deformation in Pt layer and enhance the remnant polarization.
