A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays
A dual function Parylene-based biomimetic tactile sensor and actuator for next generation mechanically responsive microelectrode arrays
复制标题
用于下一代机械响应微电极阵列的双功能基于聚对二甲苯的仿生触觉传感器和执行器
DOI：
10.1109/sensor.2009.5285612
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发表时间：
2009
期刊：
影响因子：
--
通讯作者：
E. Meng
中科院分区：
文献类型：
--
作者：
C. Gutierrez;E. Meng
我们提出了第一个基于聚对二甲苯的多模式仿生平台，能够测量触觉力，同时通过可移动微电极实现神经组织的主动刺激/记录。封装叉指微电极的充满液体的微室具有驱动和触觉传感的双重功能。电极是基于阻抗的触觉传感元件和用于产生电解气体以气动控制微电极位置的位置。经证明，阻抗灵敏度高达 1.7%/μm，平面外定位高达 8μm。我们还报告了仿生通道结构的机械转导。
We present the first multimodal Parylene-based biomimetic platform with the ability to measure tactile forces while simultaneously enabling active stimulation/recording of neural tissue via movable microelectrodes. A liquid-filled microchamber encapsulating interdigitated microelectrodes performs the dual functions of actuation and tactile sensing. The electrodes are impedance-based tactile sensing elements and sites for electrolytic gas generation for pneumatic control of microelectrode position. Impedance sensitivity of up to 1.7 %/µm and out-of-plane positioning up to 8 µm were demonstrated. We also report on the mechanotransduction of biomimetic channel structures.