Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation.
Ultraviolet/ozone cleaning of a soft x-ray grating contaminated by synchrotron radiation.
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对受同步辐射污染的软 X 射线光栅进行紫外线/臭氧清洁。
DOI：
10.1364/ao.30.001165
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发表时间：
1991
期刊：
影响因子：
1.9
通讯作者：
Hitoshi Yamaoka
中科院分区：
文献类型：
--
作者：
Tatsuo Harada;Sumio Yamaguchi;Masaaki Itou;Shichiro Mitani;Hideki Maezawa;Akira Mikuni;Wataru Okamoto;Hitoshi Yamaoka
对被同步辐射碳污染的栅格进行了紫外光/臭氧清洗，清洗后软X射线反射率恢复到原来的水平。
A grating which was carbon contaminated by synchrotron radiation was cleaned using UV/ozone asher, and soft x-ray reflectivity was recovered into the original level after cleaning.