SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter
SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter
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SMART：带能量滤波器的像差校正 XPEEM/LEEM
DOI：
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发表时间：
1998
期刊：
影响因子：
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通讯作者：
E. Umbach
中科院分区：
文献类型：
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作者：
R. Wichtendahl;R. Fink;H. Kuhlenbeck;D. Preikszas;H. Rose;R. Spehr;P. Hartel;W. Engel;R. Schlögl;H. Freund;A. Bradshaw;G. Lilienkamp;T. Schmidt;E. Bauer;G. Benner;E. Umbach
目前正在建造一台新型 UHV 能谱 X 射线光电子发射和低能电子显微镜，以便安装在 BESSY II 的 PM-6 软 X 射线波荡器束线上。采用精密磁分束器和静电四极镜的组合，校正了物镜的球差和色差，从而提高了仪器的横向分辨率和灵敏度。此外，经过校正的成像能量滤波器（所谓的欧米茄滤波器）可在光电发射模式下实现高光谱分辨率（ΔE=0.1 eV），并在 LEEM 和小光斑 LEED 模式下实现背景抑制。理论预测横向分辨率为5A；现实的目标是大约 2 nm。因此，各种电子光谱（XAS、XPS、UPS、XAES）和电子衍射（LEED、LEEM）或反射技术（MEM）将具有迄今为止尚未达到的空间分辨率。
A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution (ΔE=0.1 eV) in the photoemission modes and back-ground suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 A; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.