Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices
Stabilization of Cubic AlN in Epitaxial AlN/TiN Superlattices
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DOI：
10.1103/physrevlett.78.1743
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发表时间：
1997-03
影响因子：
8.6
通讯作者：
A. Madan;Ilwon Kim;S. Cheng;P. Yashar;V. Dravid;S. Barnett
中科院分区：
文献类型：
--
作者：
A. Madan;Ilwon Kim;S. Cheng;P. Yashar;V. Dravid;S. Barnett
AlN/TiN（001）超晶格中AlN的高压岩盐结构稳定，AlN层厚度≤ 2.0 nm。使用X射线衍射、透射电子显微镜和电子能量损失谱，显示AlN层是纯岩盐结构AlN，无应力晶格参数为0.408±0.002 nm。当AlN层厚> 2nm时，观察到稳定的六方相。岩盐结构形成在小的层厚度，因为它提供了较低的AlN/TiN的界面能比六方或锌-TiN结构。
The high-pressure rocksalt structure of AlN was stabilized in epitaxial AlN/TiN (001) superlattices with AlN layer thickness≤ 2.0 nm. The AlN layers were shown to be pure rocksalt-structure AlN, with a stress-free lattice parameter of 0.408±0.002 nm, using x-ray diffraction, transmission electron microscopy, and electron energy loss spectroscopy. The stable hexagonal phase was observed for AlN layer thickness> 2 nm. The rocksalt structure formed at small layer thicknesses since it provided lower AlN/TiN interfacial energy than the hexagonal or zinc-blende structures.