Laser crystallization and structuring of amorphous germanium
Laser crystallization and structuring of amorphous germanium
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DOI：
10.1063/1.119236
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发表时间：
1997-06
期刊：
影响因子：
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通讯作者：
M. Mulato;D. Toet;G. Aichmayr;P. Santos;I. Chambouleyron
中科院分区：
文献类型：
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作者：
M. Mulato;D. Toet;G. Aichmayr;P. Santos;I. Chambouleyron
利用时间分辨反射光谱和拉曼光谱研究了非晶锗薄膜的短脉冲激光晶化和干涉结构。我们表明，具有非常尖锐的横向界面的亚微米晶体结构可以通过非氢化样品的激光干涉结晶产生。另一方面，在氢化膜中，膜表面在激光曝光时破裂，导致形成独立的结晶膜。激光晶化锗的拉曼光谱显示出有限晶粒尺寸和应力效应。
The short-pulse laser crystallization and interference structuring of amorphous germanium films were investigated by time resolved reflection measurements and Raman spectroscopy. We demonstrate that submicrometer crystalline structures with very sharp lateral interfaces can be produced by laser interference crystallization of nonhydrogenated samples. In hydrogenated films, on the other hand, the film surface disrupts upon laser exposure leading to the formation of a free-standing crystalline membrane. The Raman spectra of laser crystallized germanium display effects of finite crystallite size and stress.