Evaluation of thermo ‐ oxidative degradation behavior of gasket rubber sheet deposited with SiOxNy gas barrier films, International Journal of Modern Physics
Evaluation of thermo ‐ oxidative degradation behavior of gasket rubber sheet deposited with SiOxNy gas barrier films, International Journal of Modern Physics
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沉积有 SiOxNy 阻气膜的垫片橡胶板的热氧化降解行为评估，国际现代物理学杂志
DOI：
10.1142/s2010194512003534
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发表时间：
2012
期刊：
影响因子：
--
通讯作者：
D. Yonekura and R. Murakami
中科院分区：
文献类型：
--
作者：
T. Kobayashi;Y. Tabata;D. Yonekura and R. Murakami
本研究的目的是阐明SiOxNygas阻隔膜的膜厚度对具有SiOxNyfilm的垫片橡胶片的热氧化降解行为的影响。采用直流磁控溅射法制备了SiOxNy薄膜。沉积SiOxNy膜，沉积时间为10、20、40和60分钟。用FT-IR分析了SiOxNy膜的化学键状态，并以PET为基材，测量了SiOxNy膜的透氧率。用原子力显微镜观察了沉积在垫片橡胶片上的薄膜的表面形貌。通过加热后的拉伸试验评价密封胶片的热氧降解。样品的加热在160、170和180°C下在各种加热时间下进行。采用扫描电镜对拉伸试验后的密封胶片断口进行了观察。结果，发现气体阻挡膜有效地延迟垫圈橡胶片的热氧化降解，特别是在160°C加热下加热。
The purpose of this study is to clarify the effect of the film thickness of SiOxNygas barrier film on the thermo-oxidative degradation behavior of gasket rubber sheet with SiOxNyfilm. SiOxNyfilm was deposited by DC magnetron sputtering method. SiOxNyfilms were deposited for deposition time 10, 20, 40 and 60 minutes. Chemical bonding states of SiOxNyfilms were analyzed by FT-IR. Oxygen transmission rate of SiOxNyfilms were measured using PET substrate with SiOxNyfilms. The surface morphology of the film deposited on the gasket rubber sheet was observed using atomic force microscope. Thermo-oxidative degradation of gasket rubber sheet was evaluated by tensile test after heating. Heating of the samples was performed at 160, 170 and 180°C under various heating time. The fracture surface of gasket rubber sheet after tensile test was observed using scanning electron microscope. As a result, it was found that the gas barrier film was effective to delay the thermo-oxidative degradation of gasket rubber sheet, especially heated at 160°C heating.