Mid-infrared SOI waveguide thermo-optic Fourier-transform spectrometer
Mid-infrared SOI waveguide thermo-optic Fourier-transform spectrometer
复制标题
中红外SOI波导热光傅立叶变换光谱仪
DOI：
10.1117/12.2649189
复制
发表时间：
2023
期刊：
影响因子：
--
通讯作者：
Wei C
中科院分区：
文献类型：
--
作者：
Wei C
中红外（mid-IR）是振动吸收光谱（例如气体传感、医疗诊断、环境监测）的重要波长范围，因此对小型和稳定的片上光谱仪有很强的需求。还希望它制造成本低廉，并且能够在宽带宽上执行高分辨率测量。为此，我们展示了两种中红外热光学型傅立叶变换光谱仪（FTS）。这两种器件的设计目标都是3.8 μm的中心波长，并基于绝缘体上硅平台。当量子级联激光被调谐到不同波长时，这两个装置通过使用它们来检索光谱来验证。通过后续的设计优化，它们有可能实现更高的分辨率和带宽，并且将来可以与中红外光电探测器集成。
The mid-infrared (mid-IR) is an important wavelength range for vibrational absorption spectroscopy (e.g. for gas sensing, medical diagnostics, environmental monitoring), and thus there is a strong need for small and stable on-chip spectrometers. It is also desirable for it to be inexpensive to fabricate and for it to be able to perform high-resolution measurements over a wide bandwidth. To this end, we demonstrate two kinds of mid-IR thermo-optic type Fourier Transform spectrometers (FTS). Both variations of the device are designed to target a central wavelength of 3.8 μm and are based on the silicon-on-insulator platform. These two devices are verified by using them to retrieve the spectrum of a quantum cascade laser when it is tuned to different wavelengths. They have the potential to achieve higher resolution and bandwidth through subsequent design optimization, and could in future be integrated with mid-infrared photodetectors.
影响因子：
16.6
作者：
Kita DM;Miranda B;Favela D;Bono D;Michon J;Lin H;Gu T;Hu J
通讯作者：
Hu J
光学光谱仪的小型化
DOI：
10.17863/cam.64169
发表时间：
2021
期刊：
--
影响因子：
--
作者：
Yang Z
通讯作者：
Yang Z