Yoshihiro Okuno,Shinya Yagura Hiroharu Fujita: "Observation of a magnetized lowーpressure rf plasma for thinーfilm preparation" Journal of Applied Physics. 69. 146-150 (1991)
Yoshihiro Okuno,Shinya Yagura Hiroharu Fujita: "Observation of a magnetized lowーpressure rf plasma for thinーfilm preparation" Journal of Applied Physics. 69. 146-150 (1991)
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Yoshihiro Okuno、Shinya Yagura Hiroharu Fujita:“用于薄膜制备的磁化低压射频等离子体的观察”应用物理学杂志 69. 146-150 (1991)。
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