Real-time measurement of pressure inside field-emission displays
Real-time measurement of pressure inside field-emission displays
复制标题
实时测量场发射显示器内的压力
DOI：
10.1063/1.1412280
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发表时间：
2001
期刊：
影响因子：
--
通讯作者：
K. Dean
中科院分区：
文献类型：
--
作者：
B. Chalamala;R. Reuss;K. Dean
我们提出了一种非破坏性的，实时测量密封平板场发射显示器内的压力的方法。与离子计类似，场发射电子用于电离极间区域内的残留气体，并测量由此产生的离子电流。该过程在具有已知气压的真空室中校准。接下来，我们展示了密封场发射显示器内部的压力测量方法，该显示器配备了旋转转子测量附件以进行比较。我们发现，良好的相关性之间的旋转转子的压力计测量和我们的方法测量的压力。此外，我们观察到，场致发射显示器的操作导致类似于在其他真空电子管中观察到的离子泵效应的压力的快速下降。
We present a method for nondestructive, real-time measurement of pressure inside sealed flat-panel field-emission displays. Analogous to an ion gauge, field-emitted electrons were used to ionize residual gases within the interelectrode region and the resulting ion current was measured. The procedure was calibrated in a vacuum chamber with known gas pressure. Next, we demonstrated the pressure measurement method inside sealed field-emission displays outfitted with spinning rotor gauge attachments for comparison. We found good correlation between the spinning rotor gauge measurement and the pressure measured by our method. In addition, we observed that the operation of the field-emission display resulted in a rapid drop in pressure similar to ion pumping effects observed in other vacuum electron tubes.