Comparison of spatial resolutions obtained with different signal components in scanning electron microscopy.

Comparison of spatial resolutions obtained with different signal components in scanning electron microscopy.
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扫描电子显微镜中不同信号分量获得的空间分辨率的比较。

DOI:
10.1016/s0304-3991(96)00053-8
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发表时间:
1996
期刊:
影响因子:
2.2
通讯作者:
M. Vittor Antisari
M. Vittor Antisari
中科院分区:
工程技术3区
文献类型:
--
作者:
P. Merli;A. Migliori;M. Nacucchi;M. Vittor Antisari

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