Influence of chamber pressure on the crystal quality of homo-epitaxial GaN grown by radical-enhanced MOCVD (REMOCVD)
Influence of chamber pressure on the crystal quality of homo-epitaxial GaN grown by radical-enhanced MOCVD (REMOCVD)
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DOI:
10.1016/j.jcrysgro.2020.125863
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发表时间:
2020-11
影响因子:
1.8
通讯作者:
F. Amalraj;Naohiro Shimizu;O. Oda;K. Ishikawa;M. Hori
中科院分区:
文献类型:
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作者:
F. Amalraj;Naohiro Shimizu;O. Oda;K. Ishikawa;M. Hori