A latching MEMS relay for DC and RF applications
A latching MEMS relay for DC and RF applications
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DOI：
10.1109/holm.2004.1353121
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发表时间：
2004-11
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通讯作者：
V. Agrawal
中科院分区：
文献类型：
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作者：
V. Agrawal
描述了一种基于热致动器的用于直流和射频应用的闩锁MEMS继电器。与需要电压来保持闭合状态的静电MEMS继电器相比，该继电器是真正的机械闭锁设计，其中不需要功率来保持状态。对于直流应用，继电器通常可以在冷开关配置中切换250 mA的电流，在热开关应用中在10 V时切换高达10 mA的电流。对于RF中继器，基于类似的设计，典型的性能参数（在6 GHz下）为：隔离/spl sim/-40dB，并且>插入损耗<-1.0dB和回波损耗<-15dB。
A latching MEMS relay, based on thermal actuator, for both DC and RF applications are described. In contrast to electrostatic MEMS relays that require a voltage to hold a closed state, this relay is a true mechanical latching design where no power is required to hold a state. For DC applications, the relay can typically switch 250 mA of current in cold switching configuration, and up to 10 mA at 10 V in hot switching applications. For RF relay, based on the similar design, typical performance parameters are (at 6 GHz): isolation /spl sim/-40 dB, and > insertion loss <-1.0 dB and return loss <-15 dB.