Mechanical Properties and Surface Morphology of Diamond-Like Carbon Films with SiNx Interlayer
Mechanical Properties and Surface Morphology of Diamond-Like Carbon Films with SiNx Interlayer
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DOI：
10.4028/www.scientific.net/amm.723.515
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发表时间：
2015-01
期刊：
影响因子：
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通讯作者：
Q. Chen;K. Shih;M. Duan;Lielin Wang
中科院分区：
文献类型：
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作者：
Q. Chen;K. Shih;M. Duan;Lielin Wang
类金刚石（DLC）薄膜具有优异的物理、机械、生物医学和摩擦学性能，使其成为众多工业应用所需的先进机械系统的理想材料。本研究采用直流磁控溅射法在Si（100）衬底上沉积类金刚石薄膜。研究了中间层对类金刚石薄膜成分、结构和力学性能的影响。扫描电子显微镜（SEM）和原子力显微镜（AFM）的研究表明，创建高均匀的表面形貌和低粗糙度的DLC膜与氮化硅中间层。为了比较，也生长了具有不同中间层的DLC膜。分析拉曼光谱以表征膜组成。采用压痕法测试了DLC膜的力学性能。拉曼，SEM和AFM分析与DLC膜的机械性能。
Diamond-like carbon (DLC) film has remarkable physical, mechanical, biomedical and tribological properties that make it attractive material for numerous industrial applications needs of advanced mechanical systems. In this study, deposition process of DLC films on Si (100) are performed by direct-current (DC) magnetron sputtering method. The effects of interlayer on the compositions, structures and mechanical properties of DLC films are studied. The scanning electron microscopy (SEM) and atomic force microscopy (AFM) studies reveal the creation of high uniform surface morphology and low roughness DLC films with SiNx interlayer. For comparison, DLC films with different interlayers are also grown. The Raman spectra are analyzed in order to characterize the film compositions. Indentation test was performed to value the mechanical properties of DLC films. Raman, SEM, and AFM analyses are correlated with the mechanical properties of the DLC films.