Analysis of Surface Acoustic Waves Obliquely Propagating under Metallic Gratings with Finite Thickness
Analysis of Surface Acoustic Waves Obliquely Propagating under Metallic Gratings with Finite Thickness
复制标题
有限厚度金属光栅下声表面波倾斜传播的分析
DOI：
10.1143/jjap.35.3006
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发表时间：
1996
期刊：
影响因子：
--
通讯作者：
M. Yamaguchi
中科院分区：
文献类型：
--
作者：
K. Hashimoto;G. Endoh;M. Ohmaru;M. Yamaguchi
本文提出了一种分析有限厚度金属栅斜向传播声表面波的方法。对金属栅下纵向传播锯片的离散格林函数进行了修正，并将其应用于斜向传播锯片的表征。将该方法应用于分析128°YX-LiNbO_3(128-LN)上斜传播的瑞利波，结果与实验符合较好。文中还分析了36°YX-LiTaO_3(36-LT)上斜向传播的漏波，并与128°LN的结果进行了比较。
In this paper we propose a method of analysing surface acoustic waves (SAWs) propagating obliquely under a metallic grating with finite thickness. The discrete Green function originally developed for SAWs longitudinally propagating under the metallic grating is modified, and applied to the characterisation of obliquely propagating SAWs. The method is applied to the analysis of Rayleigh SAWs obliquely propagating on 128° YX-LiNbO3 (128-LN), and the result is shown to be in good agreement with experiments. Leaky SAWs obliquely propagating on 36° YX-LiTaO3 (36-LT) are also analysed and compared with the result obtained for 128-LN.