Trend of Developing Measurement Technology Using Transmission Electron Microscope
Trend of Developing Measurement Technology Using Transmission Electron Microscope
复制标题
透射电镜测量技术的发展趋势
DOI:
10.11499/sicejl.60.608
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发表时间:
2021
期刊:
影响因子:
--
通讯作者:
小林 慶太
中科院分区:
文献类型:
--
作者:
Wandale Steven;Ichige Koichi;井上智貴,木村共孝,程俊;小林 慶太
* Nanodimensional Standards Group, Research Institute for Material and Chemical Measurement, National Metrology Institute of Japan, National Institute of Advanced Industrial Science and Technology (AIST), Central 5, 1–1–1 Higashi, Tsukuba, Ibaraki, Japan* E-mail: Kobayashi-z@ aist. go. jp