Micro-encoder based on higher-order diffracted light interference
Micro-encoder based on higher-order diffracted light interference
复制标题
基于高阶衍射光干涉的微编码器
DOI：
10.1088/0960-1317/15/8/012
复制
发表时间：
2005
影响因子：
2.3
通讯作者：
R. Sawada
中科院分区：
文献类型：
--
作者：
E. Higurashi;R. Sawada
为实现高精度定位，研制了一种基于高阶衍射光干涉原理的微型编码器。它利用±3级衍射光获得用于位移检测的干涉条纹，并提供6个信号周期以使标尺光栅移动一个光栅周期(3.2µm)，而不需要内插电路。这种微编码头包括一个分布式反馈激光二极管、边缘照明的折射面光电二极管、一对聚酰亚胺波导，每个波导都有一个全内反射镜，以及一个使被刻度光栅衍射的±3级光束同轴干涉的微型光栅。所有这些元件都是在一个3×2mm2的微机械硅光学工作台上进行的。
A micro-encoder based on higher-order diffracted light interference has been developed for use in high-precision positioning. It uses ±3-order diffracted beams to obtain interference fringes for displacement detection and provides six signal periods for moving the scale grating by one grating period (3.2 µm) without an interpolation electric circuit. This micro-encoder head includes a distributed feedback laser diode, edge-illuminated refracting-facet photodiodes, a pair of polyimide waveguides, each with a total internal reflection mirror, and a micro-grating that causes ±3-order beams, diffracted by the scale grating, to interfere coaxially. All of these components are on a micromachined Si optical bench (3 × 2 mm2).