Diamond Field-emission Cathodes
Diamond Field-emission Cathodes
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金刚石场致发射阴极
DOI：
10.1109/ivmc.1993.700331
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发表时间：
1993
期刊：
影响因子：
--
通讯作者：
M. Kordesch
中科院分区：
文献类型：
--
作者：
M. Geis;J. Twichell;C. Bozler;D. Rathman;N. Efremow;K. Krohn;M. Hollis;R. Uttaro;T. Lyszczarz;M. Kordesch
只提供摘要形式。金刚石的一些特性使其在用于场发射阴极方面具有独特的优势。金刚石是唯一已知的空气稳定负电子亲和（NEA）材料。这种NEA特性允许在非常低的电场下进行场发射。金刚石中共价键合碳晶格固有的结构完整性使得获得比金属更稳定的阴极成为可能。本报告报告了金刚石场发射阴极的初步实验。在(100)-,(110)-和（111）取向衬底上的p型，掺硼的同外延生长金刚石的光滑区和图案区都有电子发射的特征。测量结果表明了一个Fowler-Nordheim机制（穿过势垒的隧道），有效势垒高度随晶体取向而变化。（100）晶体的势垒最大，（111）晶体的势垒最小。用Cs进行表面处理可以改善排放，并且不会受到暴露于室内空气的不利影响。用光刻技术定义的栅格结构阴极已经被制造出来，并能发射接近最小理论栅格电压（5v）的电流。这些阴极在栅极电压小于100v的情况下向真空中发射密度为10a /cm/sup / /的电流。
Summary form only given. Diamond has several properties that give it unique advantages for use in field-emission cathodes. Diamond is the only known air-stable negative electron affinity (NEA) material. This NEA property may allow for field emission at very low electric fields. The inherent structural integrity of the covalently bonded carbon lattice in diamond makes possible more stable cathodes than can be obtained with metals. This presentation reports on initial experiments with diamond field-emission cathodes. Electron emission was characterized from both smooth and patterned regions on p-type, boron-doped homoepitaxial grown diamond on (100)-, (110)-, and (111)-oriented substrates. The measurements indicated a Fowler-Nordheim mechanism (tunneling through a barrier) with the effective barrier height varying as a function of the crystal orientation. The (100) crystals exhibited the largest barrier and the (111) crystals had the smallest barrier. Surface treatment with Cs improves emission and is not adversely affected by exposure to room air. Lithographically defined cathodes with grid structures have been fabricated and emit current near the minimum theoretical grid voltage, 5 V. These cathodes have emitted current densities of >10 A/cm/sup 2/ into vacuum with grid voltages less than 100 V.