Theoretical and experimental study on localization improvement in ultrasonic vibration–assisted spark-assisted electrochemical drilling process
Theoretical and experimental study on localization improvement in ultrasonic vibration–assisted spark-assisted electrochemical drilling process
复制标题
DOI：
10.1007/s00170-022-09642-x
复制
发表时间：
2022-07
期刊：
影响因子：
--
通讯作者：
Tianbo Wang;Y. Liu;Z. Lv;Kan Wang
中科院分区：
文献类型：
--
作者：
Tianbo Wang;Y. Liu;Z. Lv;Kan Wang
电火花辅助电解加工（SAEM）是一种先进的加工方法，可以在玻璃等非导电硬脆材料上加工出微细结构。然而，在SAEM加工过程中仍存在一些工艺问题，其中加工定位性差和微孔出口的损伤问题仍未得到解决。为了提高加工的局部化程度和加工质量，提出了一种超声振动辅助火花辅助电化学钻削方法。在电火花辅助电解加工过程中，超声振动的应用可以减小气膜厚度，提高气膜稳定性，降低放电能量，从而提高加工局部性和加工质量。首先，模拟了钻削过程中气膜的形成过程，分析了超声振动对气膜的影响。其次，对钻削过程中材料去除机理进行了研究和模拟，建立了数学模型。然后，通过一系列的实验，根据建立的数学模型，研究了关键加工参数与加工局部化的关系，实验结果与仿真结果一致。最后，根据单因素实验优化的加工参数，成功加工出4 × 5高质量的玻璃微孔阵列。超声振动辅助电火花辅助电化学钻削加工的微孔直径显著减小，入口直径减小了20.59%，出口直径减小了14.9%，表明超声振动辅助电火花辅助电化学钻削是提高加工局部化的有效方法。
Spark-assisted electrochemical machining (SAEM) is an advanced machining method, which can manufacture microstructures on non-conductive hard and brittle materials such as glass. However, there are still some technological problems in the process of SAEM, among which the poor machining localization and the damage of microhole outlet are still unresolved. In order to improve the localization and quality of machining, a method of ultrasonic vibration–assisted spark-assisted electrochemical drilling (UASAED) was proposed in this paper. The application of ultrasonic vibration can reduce the gas film thickness and improve its stability in the spark-assisted electrochemical machining process, and reduce the discharge energy, so the machining localization and quality can be improved. Firstly, the formation of gas film in the drilling process was simulated and the influence of ultrasonic vibration on the gas film was analyzed. Secondly, the mechanism of material removal during drilling process was studied and simulated, and the mathematical model was established. Then, through a series of experiments, according to the established mathematical model, the relationships between the key machining parameters and the machining localization were studied, and the experimental results were consistent with the simulation. Finally, according to the machining parameters optimized by single factor experiments, 4 × 5 high-quality glass microhole array was successfully machined. The diameters of microholes were significantly reduced, with the inlet diameter decreasing by 20.59% and the outlet diameter by 14.9%, which indicated that ultrasonic vibration–assisted spark-assisted electrochemical drilling is an effective method to improve the machining localization.