Uniaxial anisotropy and high-frequency permeability of novel soft magnetic FeCoTaN and FeCoAlN films field-annealed at CMOS temperatures
Uniaxial anisotropy and high-frequency permeability of novel soft magnetic FeCoTaN and FeCoAlN films field-annealed at CMOS temperatures
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DOI：
10.1016/j.jmmm.2004.05.034
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发表时间：
2004-12
影响因子：
2.7
通讯作者：
K. Seemann;H. Leiste;V. Bekker
中科院分区：
文献类型：
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作者：
K. Seemann;H. Leiste;V. Bekker
为了研究各向异性和高频行为，通过反应射频磁控溅射制备了软磁 FeCoTaN 和 FeCoAlN 薄膜。使用由 Fe47Co36Ta17 和 Fe49Co36Al15 组成的 6 英寸靶材在氧化 (100) 硅基板上生长薄膜，并带有 TiN 种子层，以实现更好的薄膜附着力。氮气浓度通过流量控制系统调节。对于铝 CMOS 加工组件等应用，薄膜在 50mT 的静磁场中在约 400°C 的温度下进行退火，通过激活原子有序过程在薄膜平面中诱导单轴各向异性。通过退火控制各向异性需要进行特定的处理，并导致面内单轴各向异性在 3 至 4mT 之间。两种材料中的氮都会导致TaN或AlN的形成，这主要有助于抑制多晶薄膜的生长。沉积后，薄膜呈现非晶结构，并在退火过程后变成纳米晶。两种材料的饱和极化强度均在 1.1 至 1.2T 之间。观察到 FeCoTaN 的铁磁共振频率约为 1.9GHz，FeCoAlN 的铁磁共振频率为 1.8GHz，这是通过使用高达 5GHz 的带状线磁导率测量频率相关磁导率来确定的。实验结果与基于 Landau-Lifschitz 和 Maxwell 涡流方程的全频率范围内的自旋动力学模型进行了比较。
In order to investigate the anisotropy and high-frequency behaviour, soft magnetic FeCoTaN and FeCoAlN films were fabricated by reactive RF-magnetron sputtering. Six-inch targets consisting of Fe47Co36Ta17and Fe49Co36Al15were used to grow the films on oxidized (100)-silicon substrates with a TiN seed layer for better film adhesion. The concentration of nitrogen was adjusted by a flow control system. For applications in, e.g., aluminium CMOS processed components the films were annealed at temperatures of about 400∘C in a static magnetic field of 50mT to induce a uniaxial anisotropy in the film plane by activating an atomic ordering process. Controlling the anisotropy by annealing demands a specified elaboration and results in an in-plane uniaxial anisotropy between 3 and 4mT. Nitrogen in both materials caused the formation of TaN or AlN which mainly supported the suppression of polycrystalline film growth. After deposition the films showed an amorphous structure and turned to be nanocrystalline after the annealing procedure. A saturation polarization in both materials amounted to between 1.1 and 1.2T. Ferromagnetic resonance frequencies of about 1.9GHz for FeCoTaN and 1.8GHz for FeCoAlN, determined by measuring the frequency-dependent permeability by means of a strip line permeameter up to 5GHz, were observed. The experimental results where compared with a spin dynamic model based on the Landau–Lifschitz and Maxwell's eddy current equation in the total frequency range.