Development of miniature needle-type hydrophone with lead zirconate titanate polycrystalline film deposited by hydrothermal method
Development of miniature needle-type hydrophone with lead zirconate titanate polycrystalline film deposited by hydrothermal method
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DOI：
10.1143/jjap.45.4688
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发表时间：
2006-05-01
期刊：
影响因子：
--
通讯作者：
Odaira, E
中科院分区：
文献类型：
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作者：
Kitsunai, H;Kawashima, N;Odaira, E
采用水热法在直径为0.3mm的钛丝上沉积锆钛酸铅（PZT）多晶薄膜，研制了一种针型微型水听器。一种是在钛丝的端面和近端侧表面水热沉积PZT多晶薄膜的水听器。另一种是只在钛丝端面上水热沉积PZT多晶薄膜的水听器。我们测量了制作的水听器的相对接收灵敏度和指向性的频率特性。在1 ~ 20 MHz的频率范围内测量了所制造的A型或B型水听器的相对接收灵敏度的频率特性。在钛丝的端面和侧面沉积PZT薄膜的水听器在相对接收灵敏度的方向性方面存在问题。侧方向的相对灵敏度高于前方向。在钛丝端面上水热沉积PZT薄膜，可以显著提高水听器的指向性。
A needle-type miniature hydrophone was developed using hydrothermally deposited lead zirconate titanate (PZT) polycrystalline films on a titanium (Ti) wire with a diameter of 0.3 mm in this study: Two types of hydrophones were fabricated as a trial for this paper. One is a hydrophone with hydrothermally deposited PZT polycrystalline films on the end surface and side surface near the end of the Ti wire. The other one is a hydrophone with hydrothermally deposited PZT polycrystalline films only on the end surface of the Ti wire. We measured the frequency characteristics of the relative receiving sensitivity and directivity of the fabricated hydrophones. The frequency characteristics of the relative receiving sensitivities of the fabricated hydrophone type A or B were measured in the frequency range from 1 to 20 MHz. Our hydrophone with deposited PZT films on the end and side faces of the Ti wire had problems in the directivity of relative receiving sensitivity. The relative sensitivity of the side direction was higher than that of the front direction. The directivity of our hydrophone with hydrothermally deposited PZT films only on the end surface of the Ti wire was improved remarkably.