Cluster ion–solid interactions from meV to MeV energies

Cluster ion–solid interactions from meV to MeV energies
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DOI:
10.1007/s00339-008-4514-2
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发表时间:
2008-04
期刊:
Applied Physics A
影响因子:
--
通讯作者:
K. Nordlund;T. Järvi;K. Meinander;J. Samela
K. Nordlund;T. Järvi;K. Meinander;J. Samela
中科院分区:
其他
文献类型:
--
作者:
K. Nordlund;T. Järvi;K. Meinander;J. Samela

文献摘要

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团簇离子与表面相互作用的性质随着进入团簇物种的动能和质量而急剧变化。在这篇文章中,我们回顾了最近的一些工作的性质集群表面相互作用跨越的能量范围从几十个MeV/原子到几个MeV/集群和集群的大小在1-300000原子/集群。我们描述了单个团簇撞击事件的五种可能的不同结果:(i)沉积成非外延配置,(ii)沉积成外延配置,(iii)通过液体流动形成陨石坑,(iv)通过静水压力形成陨石坑,(v)注入。
The nature of cluster ion–surface interactions changes dramatically with the kinetic energy and mass of the incoming cluster species. In this article we review some recent work on the nature of cluster–surface interactions spanning an energy range from a few tens of meV/atom to several MeV/cluster and cluster sizes in the range of 1–300000 atoms/cluster. We describe five possible distinct outcomes of a single cluster impact event: (i) deposition into a non-epitaxial configuration, (ii) deposition into an epitaxial configuration, (iii) crater formation by liquid flow, (iv) crater formation by hydrostatic pressure, (v) implantation.