Detailed atomic modeling of Sn plasmas for the EUV source

Detailed atomic modeling of Sn plasmas for the EUV source
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DOI:
10.1088/1742-6596/112/4/042062
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发表时间:
2008-05
期刊:
影响因子:
3.6
通讯作者:
A. Sasaki;A. Sunahara;K. Nishihawra;T. Nishikawa;F. Koike;H. Tanuma
A. Sasaki;A. Sunahara;K. Nishihawra;T. Nishikawa;F. Koike;H. Tanuma
中科院分区:
物理与天体物理2区
文献类型:
--
作者:
A. Sasaki;A. Sunahara;K. Nishihawra;T. Nishikawa;F. Koike;H. Tanuma

文献摘要

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利用Hullac程序计算得到的原子数据,建立了计算辐射传递系数的锡等离子体原子模型。我们发现发射光谱和转换效率与4d-4f跃迁阵列的波长和光谱结构密切相关。对发射有重大贡献的卫星线是通过改变原子模型中的能级数进行迭代计算后确定的。通过与实验的比较,对跃迁波长进行了修正。利用现有的发射率和不透明度,对极紫外源进行了辐射流体动力学模拟。
An atomic model of Sn plasmas is developed to calculate coefficients of radiative transfer, based on the calculated atomic data using the Hullac code. We find that the emission spectrum and conversion efficiency depend critically on the wavelength and spectral structure of the 4d-4f transition arrays. Satellite lines, which have a significant contribution to the emission, are determined after iterative calculations by changing the number of levels in the atomic model. We also correct transition wavelengths through comparison with experiments. Using the present emissivity and opacity, the radiation hydrodynamics simulation will be carried out toward the optimization of the EUV source.