Frequency response of cantilever beams immersed in viscous fluids near a solid surface with applications to the atomic force microscope
Frequency response of cantilever beams immersed in viscous fluids near a solid surface with applications to the atomic force microscope
复制标题
DOI：
10.1063/1.2136418
复制
发表时间：
2005-12-01
影响因子：
3.2
通讯作者：
Sader, JE
中科院分区：
文献类型：
--
作者：
Green, CP;Sader, JE
浸入粘性流体中悬臂梁频率响应的理论模型通常假设流体是无界的。然而，实验测量表明，接近表面可以显着影响悬臂梁的频率响应。在这篇文章中，我们严格计算了附近表面对浸没在粘性流体中的悬臂梁的频率响应的影响，并提出了一个通用的理论模型。由于其实际相关的原子力显微镜和微机电系统的应用，详细的结果与矩形几何形状的悬臂梁执行弯曲和扭转振荡。它被发现，在流体中的耗散负载是主要负责所观察到的频率响应的变化，而惯性负载施加一个相对较弱的影响。
Theoretical models for the frequency response of a cantilever beam immersed in a viscous fluid commonly assume that the fluid is unbounded. Experimental measurements show, however, that proximity to a surface can significantly affect the frequency response of a cantilever beam. In this article, we rigorously calculate the effect of a nearby surface on the frequency response of a cantilever beam immersed in a viscous fluid, and present a general theoretical model. Due to its practical relevance to applications of the atomic force microscope and microelectromechanical systems, detailed results are presented for cantilever beams with rectangular geometries executing flexural and torsional oscillations. It is found that dissipative loading in the fluid is primarily responsible for the observed variation in the frequency response, whereas inertial loading exerts a relatively weak influence.