Wafer Map Pattern Analytics Driven By Natural Language Queries
Wafer Map Pattern Analytics Driven By Natural Language Queries
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DOI：
10.1109/itcasia55616.2022.00016
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发表时间：
2022-08
期刊：
影响因子：
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通讯作者：
Y. Zeng;Min Jian Yang;Li-C. Wang
中科院分区：
文献类型：
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作者：
Y. Zeng;Min Jian Yang;Li-C. Wang
我们提出了一种新的方法，其中晶圆图模式分析是由自然语言查询驱动的。核心是语义解析器，其将用户查询转换为包括生成摘要图的指令的含义表示。允许的绘图类型是预定义的，其用作将用户意图传达到分析软件后端的接口。从最近的生产线上的晶圆地图的应用结果来解释所提出的方法的能力和好处。
We present a novel approach where wafer map pattern analytics are driven by natural language queries. At the core is a semantic parser that translates a user query into a meaning representation comprising instructions to generate a summary plot. The allowable plot types are pre-defined which serve as an interface that communicates user intents to the analytics software backend. Application results on wafer maps from a recent production line are presented to explain the capabilities and benefits of the proposed approach.