Microlens fabrication by the modified LIGA process
Microlens fabrication by the modified LIGA process
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DOI：
10.1109/memsys.2002.984323
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发表时间：
2002-08
期刊：
影响因子：
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通讯作者：
Sung-Keun Lee;Kwang-Cheol Lee;S.S. Lee
中科院分区：
文献类型：
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作者：
Sung-Keun Lee;Kwang-Cheol Lee;S.S. Lee
微透镜或微透镜阵列已经通过基于深X射线曝光和抗蚀剂（通常为PMMA）的热处理的新型制造技术制造。制作工艺简单，制作出的微透镜阵列和微透镜具有小于1 nm的良好表面粗糙度。PMMA的分子量和玻璃化转变温度在深X射线照射下降低。微透镜是通过表面张力和回流的影响，通过对辐照的PMMA施加热处理而产生的。微透镜的配置由诸如PMMA上的吸收X射线剂量、加热温度和热处理中的加热时间的参数确定。所产生的微透镜的直径范围从30 /spl mu/m到1500 /spl mu/m，并且它们的高度在10 /spl mu/m和25 /spl mu/m之间变化。
A microlens or microlenses array has been fabricated by a novel fabrication technology which is based upon a deep X-ray exposure and a thermal treatment of a resist, usually PMMA. The fabrication technology is very simple and produces the microlenses array as well as the microlens which has good surface roughness less than I nm. Molecular weight and glass transition temperature of PMMA is reduced when it is exposed to the deep X-ray. The microlens is produced through the effect of surface tension and reflow by applying the thermal treatment on the irradiated PMMA. A configuration of the microlens is determined by parameters such as absorbed X-ray dose on PMMA, heating temperature, and heating time in the thermal treatment. Diameters of the produced microlens range from 30 /spl mu/m to 1500 /spl mu/m and their heights vary between 10 /spl mu/m and 25 /spl mu/m.