Mechanical characterization and properties of DLC films
Mechanical characterization and properties of DLC films
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DOI：
10.1007/978-0-387-49891-1_3
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发表时间：
2008
期刊：
影响因子：
--
通讯作者：
P. Lemoine;J. Quinn;P. Maguire;J. McLaughlin
中科院分区：
文献类型：
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作者：
P. Lemoine;J. Quinn;P. Maguire;J. McLaughlin
本章综述了类金刚石碳（DLC）材料的机械特性。它探讨了这些研究背后的动机，提出了实验方法来验证它们，并讨论了主要的研究结果。类金刚石具有广泛的力学性能，其中四面体结合的最佳试样在某些情况下接近金刚石的性能。本章还讨论了内应力、掺杂和分层的影响。然而，我们注意到一些剩余的问题，这主要涉及的纳米压痕协议超薄层，一个重要的方面的问题是基板变形和尖端钝化的同时效果。为此，设计了一种新的分析方法，提取本征膜的硬度HF。通过对各种DLC膜的测量，我们发现HF值随厚度的增加而增加，至少在50 nm以下。这一结果得到了补充非力学分析的支持。这一点在其他地方也有观察到，并与当前的增长模式相一致。非常薄的DLC层的固有特性的这种独立相关性是一项困难的任务。
This chapter reviews the mechanical characteristics of diamond-like carbon (DLC) materials. It examines the motivations behind such studies, presents the experimental methods used to characterise them and discusses the main findings. DLC usually present wide-ranging mechanical properties, with the best specimen being tetrahedrally bonded in some cases approaching the performances of diamond. The chapter also discusses the effect of internal stress, doping and layering. However, we note a number of remaining issues, which concern mainly the nanoindentation protocols for ultra-thin layers, a significant aspect of the problem being the simultaneous effect of substrate deformations and tip blunting. To that end, a new analytical method was designed which extracts the intrinsic film's hardnessHF. Surveying a variety of DLC layers, we find that theHFvalue tends to increase with thickness, at least up to 50 nm. This result is supported by complementary non-mechanical analysis. It is also observed elsewhere and is consistent with current growth models. Such independent correlation of the intrinsic characteristics of very thin DLC layers is a difficult task.