A Self-Mixing Displacement Sensor With Fringe-Loss Compensation for Harmonic Vibrations
A Self-Mixing Displacement Sensor With Fringe-Loss Compensation for Harmonic Vibrations
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DOI：
10.1109/lpt.2010.2040825
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发表时间：
2010-03-15
影响因子：
2.6
通讯作者：
Rakic, Aleksandar D.
中科院分区：
文献类型：
--
作者：
Zabit, Usman;Bony, Francis;Rakic, Aleksandar D.
The disappearance of self-mixing fringes in the moderate feedback regime decreases the displacement measurement accuracy. The proposed method detects and compensates the fringe-loss, to limit the error to around 40 nm for micrometer range harmonic amplitude displacements. Moreover, it can also treat arbitrary displacements without any time-consuming optimization procedure and is suitable for implementation in a real-time displacement sensor.
