A Two-Axis Water-Immersible Micro Scanning Mirror Driven by Single Inductor Coil through Dynamic Structural Filtering
A Two-Axis Water-Immersible Micro Scanning Mirror Driven by Single Inductor Coil through Dynamic Structural Filtering
复制标题
动态结构滤波单电感线圈驱动的两轴水浸式微扫描镜
DOI：
10.1016/j.sna.2018.10.029
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发表时间：
2018
期刊：
影响因子：
--
通讯作者：
J. Zou
中科院分区：
文献类型：
--
作者：
Song Xu;Xiaoyu Duan;J. Zou
本文报道了一种由单线圈驱动的新型电磁两轴水浸式扫描镜及其在三维超声显微成像中的应用。由于两个扫描轴的显著不同的共振频率的固有动态结构滤波被用于抑制它们的机械耦合，因此允许两个扫描运动的独立控制。为了验证这一点，设计、制造并测试了一个原型微扫描镜。快轴和慢轴在空气和水中的共振频率分别为720/72 Hz和690/55 Hz。在谐振频率处，快轴和慢轴的光学倾斜角与驱动电流的幅值呈良好的线性关系。两个轴同时驱动，稳定和可重复的二维光栅扫描实现在空气和水中。通过调节快轴和慢轴驱动电流之间的相位差来移动光栅扫描路径，还展示了具有增加的图像“像素”密度的2D B模式和3D超声显微成像。
In this paper, we report a new electromagnetic two-axis water-immersible scanning mirrors driven by a single inductor coil and its application in 3D scanning ultrasound microscopic imaging. The intrinsic dynamic structural filtering due to significantly different resonance frequencies of the two scanning axes was used to suppress their mechanical coupling and therefore allow independent control of the two scanning motions. For verification, a prototype micro scanning mirror was designed, fabricated and tested. The resonance frequencies of the fast and slow axes in air and water were 720/72 Hz and 690/55 Hz, respectively. The optical tilting angles of both fast and slow axes at the resonance frequencies were characterized, showing good linearity with the amplitude of the driving current. With both axes driven simultaneously, stable and repeatable 2D raster scanning was achieved in both air and water. By tuning the phase differences between the fast- and slow-axis driving currents to shift the raster scanning paths, 2D B-mode and 3D ultrasound microscopic imaging with increased density of image ‘pixels’ were also demonstrated.