Cleaning of optical surfaces by excimer laser radiation
Cleaning of optical surfaces by excimer laser radiation
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DOI：
10.1016/0169-4332(95)00459-9
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发表时间：
1996-04
影响因子：
6.7
通讯作者：
K. Mann;B. Wolff-Rottke;F. Müller
中科院分区：
文献类型：
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作者：
K. Mann;B. Wolff-Rottke;F. Müller
研究了脉冲紫外激光对铝反射镜表面微粒去除的影响。这些研究与天文学家的需求密切相关，他们正在寻找一种更有效的方法来清洁未来的超大望远镜（VLT）镜子。系统的参数研究已经进行，以确定产生最高的除尘效率（即反射率增加）的污染样品的照射条件。粒子去除率随着激光能量密度的增加而增加，但受到涂层损伤阈值的限制。数据表明，在Al涂层的BK 7和Zerodur样品上，KrF激光辐射产生最佳结果，其清洁效率与聚合物膜剥离相当。清洁涂层的初始反射率几乎可以恢复，特别是当在样品表面上施加额外的溶剂膜时。
The effect of particle removal from Al mirror surfaces by the influence of pulsed UV laser radiation has been studied. The investigations are closely related to the demands of astronomers, who are looking for a more effective way to clean future very large telescope (VLT) mirrors [1]. A systematic parameter study has been performed in order to determine the irradiation conditions which yield the highest dust removal efficiency (i.e. reflectivity increase) on contaminated samples. The particle removal rate increases with increasing laser fluence, being limited however by the damage threshold of the coating. Data indicate that on Al coated BK7 and Zerodur samples KrF laser radiation yields the optimum result, with cleaning efficiencies comparable to polymer film stripping. The initial reflectivity of the clean coating can nearly be restored, in particular when an additional solvent film on the sample surface is applied.