A reflow process for glass microlens array fabrication by use of precision compression molding
A reflow process for glass microlens array fabrication by use of precision compression molding
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DOI：
10.1088/0960-1317/18/5/055022
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发表时间：
2008-05-01
影响因子：
2.3
通讯作者：
Pongs, Guido
中科院分区：
文献类型：
--
作者：
Chen, Yang;Yi, Allen Y.;Pongs, Guido
提出了一种低成本、大批量制备玻璃微透镜阵列的新方法。该制造工艺包括三个主要步骤，即，制造具有微尺寸孔阵列的玻璃碳模具，玻璃压缩成型以在玻璃基板上产生微圆柱体，以及再加热以形成微透镜阵列。与传统的聚合物微透镜阵列相比，玻璃微透镜阵列更可靠，因此可以用于更关键的应用中。在这项研究中，具有不同的表面几何形状的微透镜阵列成功地制作在P-SK 57（Tg =493摄氏度）玻璃基板上使用的组合的压缩成型和热回流工艺。研究了影响最终透镜形状的主要参数，包括再加热温度和保温时间，以建立合适的制造工艺。一个数值模拟方法来评估制造过程。最后，对所制备的玻璃微透镜阵列的表面形貌和光学性能进行了分析。
A novel low-cost, high-volume fabrication method for glass microlens arrays was developed by combining compression molding and thermal reflow processes. This fabrication process includes three major steps - i.e., fabrication of glassy carbon molds with arrays of micro size holes, glass compression molding to create micro cylinders on a glass substrate, and reheating to form microlens arrays. As compared to traditional polymer microlens arrays, glass microlens arrays are more reliable and therefore may be used in more critical applications. In this research, microlens arrays with different surface geometries were successfully fabricated on a P-SK57 (T-g=493 degrees C) glass substrate using a combination of the compression molding and thermal reflow processes. The major parameters that influence the final lens shape, including reheating temperature and holding time, were studied to establish a suitable fabrication process. A numerical simulation method was developed to evaluate the fabrication process. Finally, both surface geometry and optical performance of the fabricated glass microlens arrays were analyzed.